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¢Ã Specification
Gas Flow Tube Furnace, 1200¡ÆC, 1-Heating Zone (300mm) |
Model | SH-FU-50STG300 | SH-FU-80STG300 | SH-FU-100STG300 |
Max Temp | 1200¡É |
Temp Controller | Programmable Controller |
Temp Accuracy & Stability | ¡¾1¡É |
Thermocouple | K Type |
Dimension Tube | 50¡¿1000 (¥Õ¡¿L) | 80¡¿1000 (¥Õ¡¿L) | 100¡¿1000 (¥Õ¡¿L) |
Dimension Hot Zone | 300(mm) Length |
Dimension External(mm) | 502¡¿345¡¿517 | 502¡¿365¡¿537 | 1080¡¿745¡¿955 |
Weight | 27kg | 32kg | 48kg |
Heater Capa | 2000W | 2500W | 3200W |
Heater Element | Kanthal A-1 |
Insulation | Ceramic Board & Wool |
Power | 220V, ´Ü»ó |
Gas Flow Meter | Kozima gas º° Àü¿ë ball type |
Gas Sealing Mask | SUS 316 & Tube Lock Connector |
¢Ã Feature
Tube·ÎÀÇ GasÁÖÀԽà GasÀÇ À¯½Ç¾øÀÌ ÁÖÀÔÇÒ¼ö ÀÖµµ·Ï Ư¼öÇÏ°Ô Á¦ÀÛµÈ Sealing Module°ú Gas Flowmeneter¸¦ ÀÌ¿ëÇÏ¿© Tube³» Gas ȯ°æ°ú ¿ÜºÎȯ°æ°úÀÇ ¿ÏÀüºÐ¸®¸¦ ÅëÇØ Á¤È®ÇÑ ¹ÝÀÀ½ÇÇèÀ» ¾òÀ»¼ö ÀÖ½À´Ï´Ù.
³Ã°¢¼ö¸¦ °ø±ÞÇÒ ¼ö ÀÖµµ·Ï Á¦ÀÛµÈ Sealing ModuleÀº Sealing Packing ÀÇ ³»±¸¼ºÀ» Çâ»ó½ÃÄÑ °í¿ÂÀ¯Áö»Ó ¾Æ´Ï¶ó Áø°øÆßÇÁ ¹× Gas °ø±ÞÀåÄ¡¿Í ¿¬°áÇÏ¿© Tube³» Gas Æ÷È»óŸ¦ À¯Áö½Ãų ¼ö ÀÖ¾î ±×µ¿¾ÈÀÇ Gas ġȯ½Ã ¹ß»ýµÈ GasÀÇ ´Ù·®¼Ò¸ð ¹æÁö¿Í GasºÒÆ÷È»óÅ µîÀ¸·Î ½ÇÇèÁß ½ÃÆíÀÌ »êȵǴ µîÀÇ Å« ´ÜÁ¡À» ±Øº¹ÇÑ ÀåºñÀÔ´Ï´Ù.
ÇϴܺÎÀÇ Frame¿¡ Áø°øÆßÇÁ¸¦ ÀåÂøÇÒ ¼ö ÀÖµµ·Ï ÇÏ¿© ÀåºñÀÇ À̵¿¼ºÀÌ ¿ëÀÌÇϸç CompactÇÑ ±¸Á¶·Î Á¦ÀÛµÇ¾î ¿Ü°ü»ó ¿ì¼öÇÕ´Ï´Ù.(Option)
Áø°ø°øÁ¤¾øÀÌ Gas Flow¿¡ ÀÇÇÑ Gas Æ÷È»óŵµ °¡´ÉÇÕ´Ï´Ù.
[Order Information]
* 1200¡É Æ©ºêÀü±â·Î
SH-FU-50STG300 : Program type, 1800W, Max 1200¡É , 300mm È÷ÆÃÁ¸
SH-FU-80STG300 : Program type, 2200W, Max 1200¡É , 300mm È÷ÆÃÁ¸
SH-FU-100STG300 : Program type, 3000W, Max 1200¡É , 300mm È÷ÆÃÁ¸
* 1200¡ÉGas Flow Package
SH-CVD-50TG300 : SH-FU-50STG300, Gas Flowmeter , Sealing Mask , Quartz Tube , Pipe&Connector , 300mm È÷ÆÃÁ¸
SH-CVD-80TG300 : SH-FU-50STG300, Gas Flowmeter , Sealing Mask , Quartz Tube , Pipe&Connector , 300mm È÷ÆÃÁ¸
SH-CVD-100TG300 : SH-FU-50STG300, Gas Flowmeter , Sealing Mask , Quartz Tube , Pipe&Connector , 300mm È÷ÆÃÁ¸
* 1200¡É Æ©ºêÀü±â·Î CVD Package
CVD-PK-50TG300 : SH-CVD-50TG300, Ä¥·¯(5CDR), Áø°øÆßÇÁ(V10), ¿ÀÀÏÆ®·¦(VOT 1020), Moving frame