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¢Ã Specification
Gas Flow Tube Furnace, 1500¡ÆC |
| Model | SH-FU-50STH300 | SH-FU-80STH300 | SH-FU-100STH300 |
| Max Temp | 1500¡É |
| Temp Controller | Programmable Controller |
| Temp Accuracy & Stability | ¡¾1¡É |
| Thermocouple | PR Type |
| Dimension Tube | 50¡¿1000 (¥Õ¡¿L) | 80¡¿1000 (¥Õ¡¿L) | 100¡¿1000 (¥Õ¡¿L) |
| Dimension Hot Zone | 300(mm) Length |
| Dimension External | 682¡¿487¡¿580 | 682¡¿517¡¿610 | 682¡¿547¡¿640 |
| Heater Capa | 5000W | 7000W | 13000W |
Weight | 67kg | 72kg | 114kg |
| Heater Element | Silicont¡¿4ea | Silicont¡¿6ea | Silicont¡¿9ea |
| Insulation | Ceramic Board & Wool |
| Power | 220V, ´Ü»ó | (220V,380V), 3¥Õ | 220V,380V 3¥Õ |
[Order Information]
* 1500¡É Æ©ºêÀü±â·Î
SH-FU-50STH300 : Program type, 5000W, Max 1500¡É, 300mm È÷ÆÃÁ¸
SH-FU-80STH300 : Program type, 7000W, Max 1500¡É, 300mm È÷ÆÃÁ¸
SH-FU-100STH300 : Program type, 13000W, Max 1500¡É, 300mm È÷ÆÃÁ¸
SH-FU-120STH300 : Program type, 9600W, Max 1500¡É, 300mm È÷ÆÃÁ¸
* 1500¡É Gas Flow Package (CVD)
SH-CVD-50TH300 : Gas Flowmeter , Sealing Mask , Alumina Tube , Pipe&Connector, 300mm È÷ÆÃÁ¸
SH-CVD-80TH300 : Gas Flowmeter , Sealing Mask , Alumina Tube , Pipe&Connector, 300mm È÷ÆÃÁ¸
SH-CVD-100TH300 : Gas Flowmeter , Sealing Mask , Alumina Tube , Pipe&Connector, 300mm È÷ÆÃÁ¸
SH-CVD-120TH300 : Gas Flowmeter , Sealing Mask , Alumina Tube , Pipe&Connector, 300mm È÷ÆÃÁ¸
*1500¡É Æ©ºêÀü±â·Î CVD Package
CVD-PK-50TH300 : SH-CVD-50TH300, 5CDR, V10, VOT 1020, moving frame
CVD-PK-80TH300 : SH-CVD-80TH300, 5CDR, V10, VOT 1020, moving frame